Hard hydrogenated carbon films with low stress
نویسندگان
چکیده
منابع مشابه
Nitrogen modification of hydrogenated amorphous carbon films
The effect of nitrogen addition on the structural and electronic properties of hydrogenated amorphous carbon ~a-C:H! films has been characterized in terms of its composition, sp bonding fraction, infrared and Raman spectra, optical band gap, conductivity, and paramagnetic defect. The variation of conductivity with nitrogen content suggests that N acts as a weak donor, with the conductivity firs...
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Amorphous hydrogenated carbon–sulfur thin films (a-C:H:S) were deposited from CH yH S gas mixtures by capacitively4 2 coupled radio-frequency PECVD. X-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS) were used to probe the composition of the films. XPS showed that the sulfur atomic percentage within a film was proportional to the fraction of H S in the H SyCH gas ...
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Low-temperature chemical vapor deposition (CVD) of B-C thin films is of importance for neutron voltaics and semiconductor technology. The highly reactive trialkylboranes, with alkyl groups of 1-4 carbon atoms, are a class of precursors that have been less explored for low-temperature CVD of B-C films. Herein, we demonstrate plasma CVD of B-C thin films using triethylboron (TEB) as a single sour...
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We present a nanoindentation study to detect time-dependent deformations in non-polymeric hydrogenated amorphous carbon films. When the bonded hydrogen content increases from 18 to 36 at.%, as measured by Fourier transform infrared spectroscopy, we find that the film becomes less graphitic and softer. Moreover, its hardness shows a larger sensitivity to strain rate and the film with the higher ...
متن کاملComparing hardness and wear data for tetrahedral amorphous carbon and hydrogenated amorphous carbon thin films
We compared nanoindentation and nanoscratch testing of 10 and 50 nm thick tetrahedral amorphous carbon (ta-C) and hydrogenated amorphous carbon (a-C:H). Raman spectroscopy shows the expected spectral features for the two carbon forms, however, luminescence from the ceramic substrate can alter the spectra. We find that hard ta-C films can blunt the diamond tip and hence use a tip area function r...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 1998
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.121874